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Which PZT thin films for piezoelectric microactuator applications?
Dubois, Marc-Alexandre, Muralt, Paul, Taylor, David V., Hiboux, StephaneVolume:
22
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589808208072
Date:
March, 1998
File:
PDF, 327 KB
english, 1998