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[IEEE 2014 IEEE 14th International Conference on Nanotechnology (IEEE-NANO) - Toronto, ON, Canada (2014.8.18-2014.8.21)] 14th IEEE International Conference on Nanotechnology - Design and analysis of a two layered 3-RRR micro/nano manipulating stage
Ding, Bingxiao, Li, YangminYear:
2014
Language:
english
DOI:
10.1109/nano.2014.6968110
File:
PDF, 1.28 MB
english, 2014