INVESTIGATION OF PHOTOLITHOGRAPHY FOR FABRICATING OF YBCO...

Modern Physics Letters B 1988 / 01 Vol. 1; Iss. 9n10

INVESTIGATION OF PHOTOLITHOGRAPHY FOR FABRICATING OF YBCO SUPERCONDUCTING THIN FILMS DEVICES WITH CHEMICAL ETCHING

SHAO, K., CAO, C.H., ZHU, H., SHEN, H.Y., LI, J.T., WANG, S.G., CUI, G.J., DAI, Y.D., ZHANG, Y., ZENG, X.H., JIANG, H.M., YANG, T.Y., LI, J.Z., WU, X.W., BAO, Z.L., WANG, S.Z., LI, C.Y.
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Volume:
1
Journal:
Modern Physics Letters B
DOI:
10.1142/S0217984988001429
Date:
January, 1988
File:
PDF, 300 KB
1988
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