Fabrication of a dual-planar-coil dynamic microphone by MEMS techniques
Horng, Ray-Hua, Chen, Kuo-Feng, Tsai, Yao-Cheng, Suen, Cheng-You, Chang, Chao-ChihVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/6/065004
Date:
June, 2010
File:
PDF, 963 KB
english, 2010