dc dynamic and static pull-in predictions and analysis for electrostatically actuated clamped circular micro-plates based on a continuous model
Liao, Lun-De, Chao, Paul C-P, Huang, Chih-Wei, Chiu, Chi-WeiVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/2/025013
Date:
February, 2010
File:
PDF, 1.19 MB
english, 2010