Silicon Crystal Growth by the Electromagnetic Czochralski...

Japanese Journal of Applied Physics 1999 / 1 Vol. 38; Iss. Part 2, No

Silicon Crystal Growth by the Electromagnetic Czochralski (EMCZ) Method

Watanabe, Masahito, Eguchi, Minoru, Hibiya, Taketoshi
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Volume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.38.l10
Date:
January, 1999
File:
PDF, 210 KB
english, 1999
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