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Spectroscopic ellipsometry investigation of the optical properties of nanostructured Si/SiN[sub x] films
A. Keita, A. E. Naciri, F. Delachat, M. Carrada, G. Ferblantier, A. SlaouiVolume:
107
Year:
2010
Language:
english
DOI:
10.1063/1.3331551
File:
PDF, 1.19 MB
english, 2010