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Electrical and Crystallographic Properties of Sputtered-Pb(Zr, Ti)O 3 Films Treated by Rapid Thermal Annealing
Yamauchi, Satoshi, Tamura, Hiroyuki, Yoshimaru, Masaki, Ino, MasayoshiVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.32.4118
Date:
September, 1993
File:
PDF, 720 KB
1993