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Large initial compressive stress in top-down fabricated silicon nanowires evidenced by static buckling
Allain, P E, Le Roux, X, Parrain, F, Bosseboeuf, AVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/1/015014
Date:
January, 2013
File:
PDF, 1.05 MB
english, 2013