Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 6
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Visualization of beams from ionic liquid ion sources for focused ion beam applications
Perez-Martinez, Carla S., Lozano, Paulo C.Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4745187
File:
PDF, 1.09 MB
english, 2012