Analytical and high accurate formula for electrostatic force of comb-actuators with ground substrate
He, Jiangbo, Xie, Jin, He, Xiaoping, Du, Lianming, Zhou, Wu, Hu, ZhiyuanVolume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2412-z
Date:
February, 2016
File:
PDF, 587 KB
english, 2016