Step-by-Step Laser Crystallization of Amorphous Si:H/SiN x :H Multilayer for Active Layer in Microcavities
Bo, Qian, San, Chen, Zhan-Hong, Cen, Kun-Ji, Chen, Yan-Song, Liu, Jun, Xu, Zhong-Yuan, Ma, Wei, Li, Xin-Fan, HuangVolume:
23
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307x/23/5/066
Date:
May, 2006
File:
PDF, 271 KB
english, 2006