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Effects of the initial stencil width on stainless steel wet chemical etching: combined model and experimental investigations
Sun, Lingjun, Liang, Junsheng, Liu, Chong, Cao, Yuanbao, Chen, Li, Liu, JunshanVolume:
19
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/8/085023
Date:
August, 2009
File:
PDF, 331 KB
english, 2009