Dry Etching Process for Pb(Zr,Ti)O 3 Thin-Film Actuators
Kokaze, Yutaka, Kimura, Isao, Endo, Mitsuhiro, Ueda, Masahisa, Kikuchi, Shin, Nishioka, Yutaka, Suu, KoukouVolume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.46.280
Date:
January, 2007
File:
PDF, 264 KB
english, 2007