Dry Etching Process for Pb(Zr,Ti)O 3...

Dry Etching Process for Pb(Zr,Ti)O 3 Thin-Film Actuators

Kokaze, Yutaka, Kimura, Isao, Endo, Mitsuhiro, Ueda, Masahisa, Kikuchi, Shin, Nishioka, Yutaka, Suu, Koukou
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.46.280
Date:
January, 2007
File:
PDF, 264 KB
english, 2007
Conversion to is in progress
Conversion to is failed