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Novel Nanofabrication Process for InAs/AlGaSb Heterostructures Utilizing Atomic Force Microscope Oxidation
Sasa, Shigehiko, Ikeda, Takatoshi, Akahori, Masato, Kajiuchi, Atsushi, Inoue, MasatakaVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.1064
Date:
February, 1999
File:
PDF, 281 KB
english, 1999