Digital Etching of InP by Intermittent Injection of Phosphorous Precursors in Ultra-high Vacuum
Otsuka, Nobuyuki, Nishizawa, Jun-ichi, Oyama, Yutaka, Kikuchi, Hideyuki, Suto, KenVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.2529
Date:
April, 1999
File:
PDF, 847 KB
english, 1999