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Design and fabrication of wireless remotely readable MEMS based microaccelerometers
Subramanian, Hareesh, Varadan, Vijay K, Varadan, Vasundara V, Vellekoop, M JVolume:
6
Language:
english
Journal:
Smart Materials and Structures
DOI:
10.1088/0964-1726/6/6/010
Date:
December, 1997
File:
PDF, 232 KB
english, 1997