Design and fabrication of wireless remotely readable MEMS...

Smart Materials and Structures 1997 / 12 Vol. 6; Iss. 6

Design and fabrication of wireless remotely readable MEMS based microaccelerometers

Subramanian, Hareesh, Varadan, Vijay K, Varadan, Vasundara V, Vellekoop, M J
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Volume:
6
Language:
english
Journal:
Smart Materials and Structures
DOI:
10.1088/0964-1726/6/6/010
Date:
December, 1997
File:
PDF, 232 KB
english, 1997
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