Transmission Electron Microscope Observation of Grown-in...

Transmission Electron Microscope Observation of Grown-in Defects Detected by Bright-Field Infrared-Laser Interferometer in Czochralski Silicon Crystals

Ikematsu, Yoichi, Mizutani, Toshiyuki, Nakai, Katsuhiko, Fujinami, Masanori, Hasebe, Masami, Ohashi, Wataru
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.37.l196
Date:
February, 1998
File:
PDF, 782 KB
english, 1998
Conversion to is in progress
Conversion to is failed