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Transmission Electron Microscope Observation of Grown-in Defects Detected by Bright-Field Infrared-Laser Interferometer in Czochralski Silicon Crystals
Ikematsu, Yoichi, Mizutani, Toshiyuki, Nakai, Katsuhiko, Fujinami, Masanori, Hasebe, Masami, Ohashi, WataruVolume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.37.l196
Date:
February, 1998
File:
PDF, 782 KB
english, 1998