Microporous layer structure in oxidized aluminium nitride...

Journal of Materials Processing Technology 2004 Vol. 146; Iss. 3

Microporous layer structure in oxidized aluminium nitride polycrystals

Wenjea J. Tseng, Chir-Jang Tsai
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Volume:
146
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.jmatprotec.2003.11.008
File:
PDF, 258 KB
english, 2004
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