Vertical System Integration by Using Inter-Chip Vias and Solid-Liquid Interdiffusion Bonding
Klumpp, Armin, Merkel, Reinhard, Ramm, Peter, Weber, Josef, Wieland, RobertVolume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.43.l829
Date:
June, 2004
File:
PDF, 185 KB
english, 2004