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Effects of oxidants on the deposition and dielectric properties of the SrTiO 3 thin films prepared by liquid source metal-organic chemical vapor deposition (MOCVD)
Hwang, Cheol Seong, Kang, Chang Seok, Cho, Hag-Ju, Park, Soon Oh, Lee, Byoung Taek, Kim, Jin Won, Horii, Hideki, Lee, Sang In, Lee, Moon YongVolume:
12
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589608013063
Date:
October, 1996
File:
PDF, 1.12 MB
english, 1996