A comparative study of the effects of reactor geometry on...

Journal of Materials Processing Technology 2005 Vol. 169; Iss. 1

A comparative study of the effects of reactor geometry on the quality of CVD diamond films deposited on silicon substrates with mixture of CH4/H2 gas flow

Mohannad Bataineh, Saeid Khatami, Jes Asmussen Jr.
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Volume:
169
Year:
2005
Language:
english
Pages:
12
DOI:
10.1016/j.jmatprotec.2005.02.256
File:
PDF, 553 KB
english, 2005
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