Effects of Grain Size and Abrasive Size of Polycrystalline Nano-particle Ceria Slurry on Shallow Trench Isolation Chemical Mechanical Polishing
Kang, Hyun-Goo, Katoh, Takeo, Kim, Sung-Jun, Paik, Ungyu, Park, Hyung-Soon, Park, Jea-GunVolume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.43.l365
Date:
February, 2004
File:
PDF, 130 KB
english, 2004