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Growth of Crystalline Zinc Oxide Thin Films by Fine-Channel-Mist Chemical Vapor Deposition
Kawaharamura, Toshiyuki, Nishinaka, Hiroyuki, Fujita, ShizuoVolume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.47.4669
Date:
June, 2008
File:
PDF, 514 KB
english, 2008