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Measuring the depth profiles of strain/composition in AlGaN-graded layer by high-resolution x-ray diffraction
Kuchuk, A. V., Stanchu, H. V., Li, Chen, Ware, M. E., Mazur, Yu. I., Kladko, V. P., Belyaev, A. E., Salamo, G. J.Volume:
116
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4904083
Date:
December, 2014
File:
PDF, 2.45 MB
english, 2014