In situ nanomanipulation system for...

Measurement Science and Technology 2007 / 12 Vol. 18; Iss. 12

In situ nanomanipulation system for electrical measurements in SEM

Noyong, Michael, Blech, Kerstin, Rosenberger, Andreas, Klocke, Volker, Simon, Ulrich
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Volume:
18
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/18/12/n02
Date:
December, 2007
File:
PDF, 648 KB
english, 2007
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