Influence of process pressure on β...

Journal of Physics Conference Series 2014 / 10 Vol. 541

Influence of process pressure on β -SiC growth by CVD

Andreev, A A, Sultanov, A O, Gusev, A S, Kargin, N I, Pavlova, E P
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Volume:
541
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/541/1/012010
Date:
October, 2014
File:
PDF, 1.40 MB
english, 2014
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