[IEEE 2014 International Conference on Optical MEMS and Nanophotonics (OMN) - Glasgow, UK (2014.8.17-2014.8.21)] 2014 International Conference on Optical MEMS and Nanophotonics - Low-temperature gold-gold bonding using argon and hydrogen gas mixture atmospheric-pressure plasma treatment for optical microsystems
Higurashi, Eiji, Yamamoto, Michitaka, Ikeda, So, Suga, Tadatomo, Sawada, RenshiYear:
2014
Language:
english
DOI:
10.1109/OMN.2014.6924607
File:
PDF, 168 KB
english, 2014