Dicing of gallium–arsenide high performance laser diodes...

Dicing of gallium–arsenide high performance laser diodes for industrial applications: Part II. Cleavage operation

K. Wasmer, C. Ballif, C. Pouvreau, D. Schulz, J. Michler
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Volume:
198
Year:
2008
Language:
english
Pages:
9
DOI:
10.1016/j.jmatprotec.2007.06.054
File:
PDF, 891 KB
english, 2008
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