Line edge roughness characterization with a...

Line edge roughness characterization with a three-dimensional atomic force microscope: Transfer during gate patterning processes

J. Thiault, J. Foucher, J. H. Tortai, O. Joubert, S. Landis, S. Pauliac
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
23
Year:
2005
Language:
english
DOI:
10.1116/1.2101789
File:
PDF, 759 KB
english, 2005
Conversion to is in progress
Conversion to is failed