Calculation of Coulomb Interaction among Electrons in a High-Current Electron-Beam Exposure System
Kotera, Masatoshi, Yukumoto, TaisukeVolume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.43.3744
Date:
June, 2004
File:
PDF, 167 KB
english, 2004