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A co-fired LTCC–PZT monomorph bridge type acceleration sensor
Sobocinski, Maciej, Leinonen, Mikko, Juuti, Jari, Mantyniemi, Noora, Jantunen, HeliVolume:
216
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2014.06.017
Date:
September, 2014
File:
PDF, 1.05 MB
english, 2014