High fill-factor micromirror array using a self-aligned...

Journal of Micromechanics and Microengineering 2009 / 03 Vol. 19; Iss. 3

High fill-factor micromirror array using a self-aligned vertical comb drive actuator with two rotational axes

Kim, Minsoo, Park, Jae-Hyoung, Jeon, Jin-A, Yoo, Byung-Wook, Park, I H, Kim, Yong-Kweon
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
19
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/3/035014
Date:
March, 2009
File:
PDF, 1.56 MB
english, 2009
Conversion to is in progress
Conversion to is failed