Structural and light emitting properties of silicon-rich...

Materials Science in Semiconductor Processing 2015 / 09 Vol. 37

Structural and light emitting properties of silicon-rich silicon nitride films grown by plasma enhanced-chemical vapor deposition

Torchynska, T.V., Casas Espinola, J.L., Khomenkova, L., Vergara Hernandez, E., Andraca Adame, J.A., Slaoui, A.
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Volume:
37
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2015.01.018
Date:
September, 2015
File:
PDF, 671 KB
english, 2015
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