Effect of Substrate Temperature on Properties of...

Japanese Journal of Applied Physics 2009 / 5 Vol. 48; Iss. 5

Effect of Substrate Temperature on Properties of Indium–Tin-Oxide Films Deposited on Poly(ethylene terephthalate) Substrate by DC Magnetron Sputtering

Lee, Dong Yeop, Lee, Gun Hwan, Song, Pung Keun
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Volume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.05EC03
Date:
May, 2009
File:
PDF, 527 KB
english, 2009
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