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THE APPLICATION OF SCANNING PHOTOELECTRON MICROSCOPY OF THE PLS (POHANG LIGHT SOURCE) TO INVESTIGATION OF SEMICONDUCTOR DEVICES
LEE, M. K., SHIN, H. J., KIM, G. B., HONG, C. K., KIM, O. H., CHANG, C. H.Volume:
9
Language:
english
Journal:
Surface Review and Letters
DOI:
10.1142/S0218625X02002543
Date:
February, 2002
File:
PDF, 630 KB
english, 2002