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A novel phase modulation-based system using bi-layer thin film displacement sensors
T. Meydan, G.S. Katranas, T.A. Ovari, F. BorzaVolume:
310
Year:
2007
Language:
english
Pages:
1
DOI:
10.1016/j.jmmm.2006.10.1030
File:
PDF, 154 KB
english, 2007