Repair effect on patterned CoFeB-based magnetic tunneling...

Repair effect on patterned CoFeB-based magnetic tunneling junction using rapid thermal annealing

Kuo-Ming Wu, Yung-Hung Wang, Wei-Chuan Chen, Shan-Yi Yang, Kuei-Hung Shen, Ming-Jer Kao, Ming-Jinn Tsai, Cheng-Yi Kuo, Jong-Ching Wu, Lance Horng
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Volume:
310
Year:
2007
Language:
english
Pages:
3
DOI:
10.1016/j.jmmm.2006.10.605
File:
PDF, 148 KB
english, 2007
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