Repair effect on patterned CoFeB-based magnetic tunneling junction using rapid thermal annealing
Kuo-Ming Wu, Yung-Hung Wang, Wei-Chuan Chen, Shan-Yi Yang, Kuei-Hung Shen, Ming-Jer Kao, Ming-Jinn Tsai, Cheng-Yi Kuo, Jong-Ching Wu, Lance HorngVolume:
310
Year:
2007
Language:
english
Pages:
3
DOI:
10.1016/j.jmmm.2006.10.605
File:
PDF, 148 KB
english, 2007