InP-Si BiCMOS Heterointegration Using a Substrate Transfer...

ECS Transactions 2013 / 05 Vol. 53; Iss. 3

InP-Si BiCMOS Heterointegration Using a Substrate Transfer Process

Lisker, M., Trusch, A., Kruger, A., Fraschke, M., Kulse, P., Borokhovych, Y., Tillack, B., Ostermay, I., Kramer, T., Thies, A., Kruger, O., Schmuckle, F.-J., Krozer, V., Heinrich, W.
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Volume:
53
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/05303.0245ecst
Date:
May, 2013
File:
PDF, 7.12 MB
english, 2013
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