IMPRINT-MOLD-CLEANING BY VACUUM ULTRAVIOLET LIGHT

IMPRINT-MOLD-CLEANING BY VACUUM ULTRAVIOLET LIGHT

NAKAO, MASASHI, YAMAGUCHI, MASANORI, YABU, SHINTARO
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Volume:
19
Language:
english
Journal:
Journal of Nonlinear Optical Physics & Materials
DOI:
10.1142/S0218863510005698
Date:
December, 2010
File:
PDF, 307 KB
english, 2010
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