Easy mask-mold fabrication for combined nanoimprint and...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2009 Vol. 27; Iss. 6

Easy mask-mold fabrication for combined nanoimprint and photolithography

H. Schift, C. Spreu, A. Schleunitz, J. Gobrecht, A. Klukowska, F. Reuther, G. Gruetzner
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Volume:
27
Year:
2009
Language:
english
DOI:
10.1116/1.3250260
File:
PDF, 598 KB
english, 2009
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