Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2005 Vol. 23; Iss. 1
Ideal delta doping of carbon in GaAs
L. Winking, M. Wenderoth, T. C. G. Reusch, R. G. Ulbrich, P. Wilbrandt, R. Kirchheim, S. Malzer, G. DöhlerVolume:
23
Year:
2005
Language:
english
DOI:
10.1116/1.1856465
File:
PDF, 510 KB
english, 2005