Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2007 Vol. 25; Iss. 3
In situ spectroscopic ellipsometry to monitor surface plasmon resonant group-III metals deposited by molecular beam epitaxy
P. C. Wu, M. Losurdo, T. Kim, S. Choi, G. Bruno, A. S. BrownVolume:
25
Year:
2007
Language:
english
DOI:
10.1116/1.2734163
File:
PDF, 847 KB
english, 2007