Lateral Silicon Field-Emission Devices using Electron Beam...

Japanese Journal of Applied Physics 2000 / 5 Vol. 39; Iss. Part 1, No

Lateral Silicon Field-Emission Devices using Electron Beam Lithography

Han, Sangyeon, Yang, Sun-a, Hwang, Taekeun, Lee, Jongho, Lee, Jong Duk, Shin, Hyungcheol
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Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.2556
Date:
May, 2000
File:
PDF, 180 KB
english, 2000
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