Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 6
Nanomachining with a focused neon beam: A preliminary investigation for semiconductor circuit editing and failure analysis
S. Tan, R. Livengood, P. Hack, R. Hallstein, D. Shima, J. Notte, S. McveyVolume:
29
Year:
2011
Language:
english
DOI:
10.1116/1.3660797
File:
PDF, 2.13 MB
english, 2011