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Effect of intrinsic stress gradient on the effective mode-I fracture toughness of amorphous diamond-like carbon films for MEMS
Krishna Jonnalagadda, Sung Woo Cho, Ioannis Chasiotis, Thomas Friedmann, John SullivanVolume:
56
Year:
2008
Language:
english
Pages:
14
DOI:
10.1016/j.jmps.2007.05.013
File:
PDF, 1005 KB
english, 2008