CHARACTERIZATION OF CUBIC BORON NITRIDE THIN FILMS DEPOSITED BY RF SPUTTER
DENG, JINXIANG, CHEN, GUANGHUA, SONG, XUEMEIVolume:
16
Language:
english
Journal:
International Journal of Modern Physics B
DOI:
10.1142/S021797920201539X
Date:
November, 2002
File:
PDF, 803 KB
english, 2002