) Films Deposited by Mid Frequency Reactive Magnetron...

International Journal of Nanoscience 2014 / 04 Vol. 13; Iss. 2

) Films Deposited by Mid Frequency Reactive Magnetron Sputtering

Kavitha, A., Kannan, R., Loganathan, S.
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Volume:
13
Language:
english
Journal:
International Journal of Nanoscience
DOI:
10.1142/S0219581X1450015X
Date:
April, 2014
File:
PDF, 501 KB
english, 2014
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