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Conformal Properties of InSbTe Thin Films Grown at a Low Temperature by MOCVD for PRAM Applications
Ahn, Jun-Ku, Cho, Hyun-Jin, Park, Kyoung-Woo, Yoon, Soon-GilVolume:
157
Year:
2010
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3363618
File:
PDF, 707 KB
english, 2010