The electron density evolution in pulsed 60 MHz...

Journal of Physics D Applied Physics 2015 / 01 Vol. 48; Iss. 3

The electron density evolution in pulsed 60 MHz capacitively coupled oxygen discharges

Liu, Fei-Xiang, Tsankov, Tsanko V, Pu, Yi-Kang
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Volume:
48
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/48/3/035206
Date:
January, 2015
File:
PDF, 1.84 MB
english, 2015
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